Alternate novolak resin fractionation

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3678, Issue II, 1999, Pages 1175-1184

  Cook, Michelle M ^a   Rahman, M Dalil ^a   Wanat, Stanley F ^a   McKenzie, Douglas ^a   Narasimhan, Balaji ^a   Fea, Robert ^a   Munoz, Melodie ^a  

^a CLARIANT CORPORATION   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CENTRIFUGES; FRACTIONATION; RESINS; SEMICONDUCTOR DEVICE MANUFACTURE;

NOVOLAK RESINS;

PHOTORESISTS;

EID: 0032678342     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.350168     Document Type: Conference Paper

References (7)