Characterizing acid mobility in chemically amplified resists via spectroscopic methods

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3678, Issue II, 1999, Pages 914-922

  Jessop, Julie L P ^a   Goldie, Scott N ^a   Scranton, Alec B ^a   Blanchard, Gary J ^a   Rangarajan, Bharath ^a   Capodieci, Luigi ^a   Subramanian, Ramkumar ^a   Templeton, Michael K ^a  

^a MICHIGAN STATE UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ABSORPTION SPECTROSCOPY; CARRIER MOBILITY; FLUORESCENCE; LIGHT ABSORPTION;

CHEMICALLY AMPLIFIED RESISTS (CAR); GROUND STATE RECOVERY; PHOTOACID GENERATION; POST EXPOSURE BAKE (PEB);

PHOTORESISTS;

EID: 0032678339     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.350279     Document Type: Conference Paper

References (28)