Space-charge results from the SCALPEL proof-of-concept system

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3676, Issue I, 1999, Pages 180-193

  Liddle, J A ^a   Blakey, M I ^a   Gallatin, G ^a   Knurek, C S ^a   Mkrtchyan, M M ^a   Novembre, A E ^a   Waskiewicz, W K ^a  

^a NOKIA RESEARCH CENTER   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRIC CURRENTS; ELECTRIC SPACE CHARGE; MATHEMATICAL MODELS; OPTICAL RESOLVING POWER; OPTIMIZATION; SEMICONDUCTOR DEVICE MANUFACTURE; THROUGHPUT;

AERIAL IMAGE METHOD;

ELECTRON BEAM LITHOGRAPHY;

EID: 0032677822     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.351090     Document Type: Conference Paper

References (10)