Adaptation of microelectronics simulator to the polycrystalline silicon technology

Solid State Phenomena

Volumn 67, Issue , 1999, Pages 131-136

  Gaillard, T ^a   Lhermite, H ^a   Bonnaud, O ^a   Rogel, R ^a  

^a Grp Microlectron et Visualisation   (France)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER SIMULATION; MICROELECTRONIC PROCESSING; POLYCRYSTALLINE MATERIALS; SEMICONDUCTOR DEVICE MODELS;

POLYCRYSTALLINE SILICON;

SEMICONDUCTING SILICON;

EID: 0032677189     PISSN: 10120394     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.4028/www.scientific.net/ssp.67-68.131     Document Type: Article

References (5)

1. Athena User's manual, SILVACO International (1996).
2. Atlas User's manual, SILVACO International (1996).
3. T.I. Kamins, J. Appl. Phys , 42, 4357 (1971).
4. J.Y. Seto, J. Appl. Phys., 48, 5247 (1975).
5. C.A. Dimitriadis, D.H. Tassis, J. Stoemenos and N.A. Economou, in Polycrystalline semiconductors III - Physics and Technology, edited by H. P. Strunk, J. H. Werner, B. Fortin, O. Bonnaud, Scitec Publications Ltd, Switzerland 37-38, 577 1994.