Interaction of a polyglycidol-based nonionic surfactant with silicon in hydrofluoric acid solutions

Journal of the Electrochemical Society

Volumn 146, Issue 6, 1999, Pages 2284-2288

  Haworth, Philip D ^a   Kovach, Michael J ^a   Sperline, Roger P ^b   Raghavan, Srini ^a  

^a University of Arizona   (United States)

^b University of Arizona   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ADSORPTION; ATOMIC FORCE MICROSCOPY; COPPER; DEPOSITION; DESORPTION; FOURIER TRANSFORM INFRARED SPECTROSCOPY; HYDROFLUORIC ACID; ORGANIC POLYMERS; SEMICONDUCTING SILICON; SURFACE ROUGHNESS; WETTING;

NONIONIC SURFACTANT; POLYGLYCIDOL;

SURFACE ACTIVE AGENTS;

EID: 0032677055     PISSN: 00134651     EISSN: None     Source Type: Journal    
DOI: 10.1149/1.1391928     Document Type: Article

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