CFD-ACE+MEMS: A CAD system for simulation and modeling of MEMS

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3680, Issue I, 1999, Pages 328-339

  Stout, Phillip ^a   Yang, H Q ^a   Dionne, Paul ^a   Leonard, Andy ^a   Tan, Zhiqiang ^a   Przekwas, Andrzej ^a   Krishnan, Anantha ^a  

^a CFD RESEARCH CORPORATION   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

BOUNDARY ELEMENT METHOD; COMPUTATIONAL FLUID DYNAMICS; COMPUTER AIDED DESIGN; COMPUTER SIMULATION; EDDY CURRENTS; ELECTROSTATICS; FINITE VOLUME METHOD; HEAT CONDUCTION; HEAT CONVECTION; HEAT RADIATION; MATHEMATICAL MODELS; NAVIER STOKES EQUATIONS;

MAXWELL EQUATION; POISSON EQUATION; SOFTWARE PACKAGE CFD-ACE+MEMS;

MICROELECTROMECHANICAL DEVICES;

EID: 0032676708     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Article

References (10)