Coupling of length scales and atomistic simulation of MEMS resonators

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3680, Issue I, 1999, Pages 104-113

  Rudd, Robert E ^a   Broughton, Jeremy Q ^a  

^a UNIVERSITY OF OXFORD   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

ALGORITHMS; COMPUTATIONAL METHODS; COMPUTER SIMULATION; FINITE ELEMENT METHOD; INTERNAL FRICTION; MICROELECTROMECHANICAL DEVICES; MOLECULAR DYNAMICS; QUARTZ; SILICON; VIBRATIONS (MECHANICAL);

MICROELECTROMECHANICAL RESONATORS; SILICON RESONATORS;

CRYSTAL RESONATORS;

EID: 0032676081     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Article

References (17)