High pressure check valve for application in a miniature cryogenic sorption cooler

Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 1999, Pages 183-188

  Burger, J F ^a   van der Wekken, M C ^a   Berenschot, E ^a   Holland, H J ^a   ter Brake, H J M ^a   Rogalla, H ^a   Gardeniers, J G E ^a   Elwenspoek, M ^a  

^a UNIVERSITY OF TWENTE   (Netherlands)

Author keywords

[No Author keywords available]

Indexed keywords

CRYOGENIC EQUIPMENT; MICROELECTROMECHANICAL DEVICES;

MICROCHECK VALVES; MINIATURE CRYOGENIC COOLERS;

VALVES (MECHANICAL);

EID: 0032675864     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/memsys.1999.746803     Document Type: Conference Paper

References (14)