Deposition, defect and weak bond formation processes in a-Si:H

Materials Research Society Symposium - Proceedings

Volumn 507, Issue , 1999, Pages 897-902

  Robertson, J ^a   Powell, M J ^a  

^a UNIVERSITY OF CAMBRIDGE   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHOUS SILICON; CHEMICAL BONDS; CRYSTAL DEFECTS; DEPOSITION; HYDROGEN; THERMAL EFFECTS;

HYDROGEN EVOLUTION;

SEMICONDUCTING SILICON;

EID: 0032675578     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (27)