Enhanced transmission line model structures for accurate resistance evaluation of small-size contacts and for more reliable fabrication

IEEE Transactions on Electron Devices

Volumn 46, Issue 7, 1999, Pages 1302-1311

  Sawdai, Donald ^b   Pavlidis, Dimitris ^a,b   Cui, Delong ^b  

^a IEEE

^b UNIVERSITY OF MICHIGAN   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

TRANSMISSION LINE MODEL (TLM) TECHNIQUES;

ELECTRIC CONDUCTIVITY; ELECTRIC LINES; ELECTRIC RESISTANCE; HETEROJUNCTION BIPOLAR TRANSISTORS; OHMIC CONTACTS; SEMICONDUCTOR DEVICE MANUFACTURE;

SEMICONDUCTOR DEVICE MODELS;

EID: 0032675037     PISSN: 00189383     EISSN: None     Source Type: Journal    
DOI: 10.1109/16.772468     Document Type: Article

References (11)

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