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Volumn 38, Issue 8, 1999, Pages 1361-1365

Determining the residual nonlinearity of a high-precision heterodyne interferometer

Author keywords

[No Author keywords available]

Indexed keywords

CALIBRATION; HETERODYNING; NONLINEAR OPTICS;

EID: 0032674867     PISSN: 00913286     EISSN: None     Source Type: Journal    
DOI: 10.1117/1.602178     Document Type: Article
Times cited : (42)

References (9)
  • 1
    • 0002674964 scopus 로고
    • Investigation and compensation of the nonlinearity of heterodyne interferometers
    • W. Hou and G. Wilkening, "Investigation and compensation of the nonlinearity of heterodyne interferometers," Precis. Eng. 14(2), 91-98 (1992).
    • (1992) Precis. Eng. , vol.14 , Issue.2 , pp. 91-98
    • Hou, W.1    Wilkening, G.2
  • 2
    • 84975582306 scopus 로고
    • Residual errors in laser interferometry from air turbulence and nonlinearity
    • N. Bobroff, "Residual errors in laser interferometry from air turbulence and nonlinearity," Appl. Opt. 26(13), 2677-2682 (1987).
    • (1987) Appl. Opt. , vol.26 , Issue.13 , pp. 2677-2682
    • Bobroff, N.1
  • 3
    • 0027662910 scopus 로고
    • Recent advances in displacement measuring interferometry
    • N. Bobroff, "Recent advances in displacement measuring interferometry," Meas. Sci. Technol. 4, 907-926 (1993).
    • (1993) Meas. Sci. Technol. , vol.4 , pp. 907-926
    • Bobroff, N.1
  • 4
    • 0025022793 scopus 로고
    • Optical sources of nonlinearity in heterodyne interferometry
    • A. E. Rosenbluth and N. Bobroff, "Optical sources of nonlinearity in heterodyne interferometry," Precis. Eng. 12, 7-11 (1990).
    • (1990) Precis. Eng. , vol.12 , pp. 7-11
    • Rosenbluth, A.E.1    Bobroff, N.2
  • 5
    • 0041907877 scopus 로고
    • High-resolution laser transducer of linear displacements
    • M. Dobosz, "High-resolution laser transducer of linear displacements," Opt. Eng. 31, 500-503 (1992).
    • (1992) Opt. Eng. , vol.31 , pp. 500-503
    • Dobosz, M.1
  • 6
    • 0003685041 scopus 로고
    • A heterodyne interferometric optical fiber displacement sensor
    • D. Tang, E. Zhang, and A. Shimokohbe, "A heterodyne interferometric optical fiber displacement sensor," Int. J. Japan Soc. Prec. Eng. 26, 207-212 (1992).
    • (1992) Int. J. Japan Soc. Prec. Eng. , vol.26 , pp. 207-212
    • Tang, D.1    Zhang, E.2    Shimokohbe, A.3
  • 7
    • 0027624783 scopus 로고
    • Electronic limitations in phase meters for heterodyne interferometry
    • N. M. Oldham, J. A. Kramar, P. S. Hetrick, and E. C. Teague, "Electronic limitations in phase meters for heterodyne interferometry," Precis. Eng. 15(3), 173-179 (1993).
    • (1993) Precis. Eng. , vol.15 , Issue.3 , pp. 173-179
    • Oldham, N.M.1    Kramar, J.A.2    Hetrick, P.S.3    Teague, E.C.4
  • 8
    • 0002884358 scopus 로고
    • A Fabry-Perot interferometer for measuring micro-displacement
    • Y. Xu, X. Ye, and C. Li et al., "A Fabry-Perot interferometer for measuring micro-displacement," Acta Metrol. Sinica 14(2), 94-97 (1993).
    • (1993) Acta Metrol. Sinica , vol.14 , Issue.2 , pp. 94-97
    • Xu, Y.1    Ye, X.2    Li, C.3
  • 9
    • 0344408712 scopus 로고
    • Effect of the nonlinear error of laser power on nanometer measurement in a heterodyne interferometer
    • J. Xu, Y. Xu, and C. Li, "Effect of the nonlinear error of laser power on nanometer measurement in a heterodyne interferometer," Acta Metrol. Sinica 15(4), 301-304 (1994).
    • (1994) Acta Metrol. Sinica , vol.15 , Issue.4 , pp. 301-304
    • Xu, J.1    Xu, Y.2    Li, C.3


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.