Design and fabrication of a high fill-factor micro-bolometer using double sacrificial layers

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3698, Issue , 1999, Pages 180-189

  Ju, Sang Baek ^a   Yong, Yoon Joong ^a   Kim, Sang Gook ^a  

^a Samwoo IMC Co   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

BOLOMETERS; CMOS INTEGRATED CIRCUITS; INFRARED DETECTORS; MICROELECTROMECHANICAL DEVICES; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION;

FOCAL PLANE ARRAYS (FPA); HIGH FILL-FACTOR MICROBOLOMETERS;

INFRARED IMAGING;

EID: 0032674716     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.354519     Document Type: Conference Paper

References (2)