Preparation and characterization of lead zirconate titanate heterolayered thin films on Pt/Ti/SiO2/Si substrate by sol-gel method

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 38, Issue 1, 1999, Pages 217-218

  Lee, Sung Gap ^a   Shim, Kwang Taek ^b   Lee, Young Hie ^b  

^a Seonam University   (South Korea)

^b Kwangwoon University   (South Korea)

Author keywords

Heterolayered thin film; Lead zirconate titanate; Nucleation site; Sol gel method; Spin coating

Indexed keywords

COATING TECHNIQUES; FERROELECTRIC MATERIALS; INTERFACES (MATERIALS); LEAD COMPOUNDS; PERMITTIVITY; PLATINUM; SILICA; SILICON; SOL-GELS; THIN FILMS; TITANIUM;

HETEROLAYERED THIN FILM; LEAD ZIRCONATE TITANATE; SOL-GEL METHOD; SPIN COATING;

DIELECTRIC FILMS;

EID: 0032674552     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/JJAP.38.217     Document Type: Article

References (4)

1. Y. Ohya, T. Ito and Y. Takahashi: Jpn. J. Appl. Phys. 33 (1994) 5272.
2. H. Suzuki, S. Kaneko, M. Mirakami and T. Hayashi: Jpn. J. Appl. Phys. 36 (1997) 5803.
3. S. G. Lee, I. G. Park, S. G. Bac and Y. H. Lee: Jpn. J. Appl. Phys. 36 (1997) 6880.
4. T. Hase, T. Sakuma, Y. Miyasaki, K. Hirata and N. Hosokawa: Jpn. J. Appl. Phys. 32 (1993) 4061.