High deposition rate amorphous silicon solar cells and thin film transistors using the pulsed plasma PECVD technique

Materials Research Society Symposium - Proceedings

Volumn 507, Issue , 1999, Pages 559-564

  Morrison, Scott ^a   Xi, Jianping ^a   Madan, Arun ^a  

^a MVSystems Inc   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHOUS SILICON; FREQUENCY MODULATION; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; THIN FILM TRANSISTORS;

ACTIVE MATRIX DISPLAYS; PULSED PLASMA TECHNIQUE;

SILICON SOLAR CELLS;

EID: 0032673621     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (9)