Comparison of CD variation between organic and inorganic bottom anti-reflective coating on topographic substrates

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3679, Issue II, 1999, Pages 932-941

  Nakaoka, Satoko ^a   Watanabe, Hisashi ^a   Okuda, Yoshimitsu ^a  

^a PANASONIC CORPORATION   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ANTIREFLECTION COATINGS; LIGHT REFLECTION; ULTRAVIOLET RADIATION;

BOTTOM ANTIREFLECTIVE COATINGS (BARC); CRITICAL DIMENSION (CD) CONTROL; DEEP ULTRAVIOLET (DUV) LITHOGRAPHY;

PHOTOLITHOGRAPHY;

EID: 0032673311     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.354411     Document Type: Conference Paper

References (8)