Full-depth optical proximity correction (FD-OPC) based on E-D forest

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3679, Issue II, 1999, Pages 600-606

  Lin, B J ^a   Young, Peter ^a  

^a Iovance Biotherapeutics   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ERROR CORRECTION; FOCUSING; OPTIMIZATION; TREES (MATHEMATICS);

FULL DEPTH OPTICAL PROXIMITY CORRECTION (FD-OPC); SIGNAMIZATION;

PHOTOLITHOGRAPHY;

EID: 0032672405     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.354372     Document Type: Conference Paper

References (5)