Enhancement of crystallization of Si films on quartz substrates by electric fields

Thin Solid Films

Volumn 343-344, Issue 1-2, 1999, Pages 288-291

  Horita, Susumu ^a   Inagaki, Daisuke ^a   Sato, Kiyotaka ^a  

^a JAPAN ADVANCED INSTITUTE OF SCIENCE AND TECHNOLOGY   (Japan)

Author keywords

Crystallization; Electric field; Poly silicon; Polycrystalline; Silicon

Indexed keywords

ACTIVATION ENERGY; CRYSTALLIZATION; DEPOSITION; ELECTRIC FIELD EFFECTS; ELECTRIC POTENTIAL; ELECTRON BEAMS; EVAPORATION; FILM GROWTH; POLYCRYSTALLINE MATERIALS; QUARTZ; SEMICONDUCTING SILICON; THERMAL EFFECTS;

ELECTRON BEAM EVAPORATION;

SEMICONDUCTING FILMS;

EID: 0032670796     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(98)01583-1     Document Type: Article

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