Role of hydrogen for microcrystalline silicon formation

Materials Research Society Symposium - Proceedings

Volumn 507, Issue , 1999, Pages 843-853

  Saitoh, K ^a   Kondo, M ^a   Fukawa, M ^a   Nishimiya, T ^a   Futako, W ^a   Shimizu, I ^a   Matsuda, A ^a  

^a ELECTROTECHNICAL LABORATORY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

COALESCENCE; CRYSTAL GROWTH; CRYSTALLINE MATERIALS; HYDROGEN; MORPHOLOGY; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; SEMICONDUCTING FILMS;

HYDROGEN ATOM RECOMBINATION ENERGY;

SEMICONDUCTING SILICON;

EID: 0032670667     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (15)