Process development on the monolithic fabrication of an ultra-compact 4×4 optical switch matrix on InP/InGaAsP material

Conference Proceedings - International Conference on Indium Phosphide and Related Materials

Volumn , Issue , 1999, Pages 103-106

  Qian, Y H ^a   Owen, M ^a   Bryce, A C ^a   Marsh, J H ^a   Wilkinson, C D W ^a   Penty, R V ^a   White, I H ^a   Perrin, S ^a   Rogers, D ^a   Robertson, M ^a  

^a UNIVERSITY OF GLASGOW   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

DRY ETCHING; LIGHT REFLECTION; MASKS; MIRRORS; REACTIVE ION ETCHING; SEMICONDUCTING INDIUM PHOSPHIDE;

TOTAL INTERNAL REFLECTION (TIR);

OPTICAL SWITCHES;

EID: 0032670453     PISSN: 10928669     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Article

References (12)