Electromigration in Al thin films induced by surface acoustic waves: application to imaging

IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control

Volumn 46, Issue 4, 1999, Pages 856-860

  Tucoulou, Rémi ^a   Brunei, Michel ^b   Roshchupkin, Dmitry V ^c   Schelokov, Igor A ^d   Colin, Jerome ^a   Grilhé, Jean ^b  

^a EUROPEAN SYNCHROTRON RADIATION FACILITY   (France)

^b LABORATOIRE DE CRISTALLOGRAPHIE   (France)

^c INSTITUTE OF MICROELECTRONICS TECHNOLOGY AND HIGH PURITY MATERIALS   (Russian Federation)

^d Lab de Metallurgie Physique   (France)

Author keywords

[No Author keywords available]

Indexed keywords

ACOUSTIC FIELDS; ACOUSTIC IMAGING; ACOUSTIC TRANSDUCERS; ALUMINUM; ELECTROMIGRATION; ETCHING; SURFACE ROUGHNESS; THIN FILMS;

ALUMINUM THIN FILMS; GRINFELD INSTABILITIES; SURFACE ACOUSTIC WAVE;

ACOUSTIC WAVE PROPAGATION;

EID: 0032669426     PISSN: 08853010     EISSN: None     Source Type: Journal    
DOI: 10.1109/58.775650     Document Type: Article

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