Hermetic glass sealing of AlN packages for high temperature applications

Journal of the European Ceramic Society

Volumn 19, Issue 6-7, 1999, Pages 1067-1070

  Krüger, Reinhard ^a   Roosen, Andreas ^a   Schaper, Wolfgang ^b  

^a UNIVERSITY OF ERLANGEN NUREMBERG   (Germany)

^b DAIMLER AG   (Germany)

Author keywords

Corrosion; Glass; Joining; Nitrides.; Soldering

Indexed keywords

CORROSION; GLASS; HIGH TEMPERATURE APPLICATIONS; JOINING; LEAD COMPOUNDS; NITRIDES; PRESSURE EFFECTS; SOLDERING; STATISTICAL MECHANICS;

ALUMINIUM NITRIDE; CHEMICAL COMPATIBILITY; CRYSTALLIZING THREE COMPONENT GLASS; GLASS SOLDERING; HERMETIC GLASS SEALING; THERMODYNAMIC CALCULATIONS;

ALUMINUM COMPOUNDS;

EID: 0032669056     PISSN: 09552219     EISSN: None     Source Type: Journal    
DOI: 10.1016/s0955-2219(98)00375-6     Document Type: Article

References (10)

1. Neumüller, O.-A., Römpps Chemielexikon, Franckh'sche Verlagsbuchhandlung Stuttgart, 7. Aufl., 1977.
2. Gosey M.T., Lodge K.J., Logan E.A. Aluminium nitride for packaging high performance electronic circuits. GEC J. of Research. 8:(3):1991;137-144.
3. Roosen, A., Modern substrate concepts for the microelectronic industry. In Electroceramics IV, ed. R. Waser. Augustinus Buchhandlung, Aachen 1994, pp. 1089-1096.
4. Takamori, T., Solder glasses. In Treatise on Materials Science and Technology, Vol. 17, Glass II, ed. M. Tomozawa and R. H. Doremus. Academic Press, New York, 1979, pp. 173-255.
5. SinghDeo, N. N. and Shukla, R. K., Solder glass processing. In Glass: Science and Technology, Vol. 2, ed. D. R. Uhlmann and N. J. Kreidl. Academic Press, New York, 1984, Kap. 6.
6. Kubota, T., Ishigame, L, Chiba, S. and Sekihara, S., Technological progress of a thick film resistor for aluminum nitride substrates with devitrifiable solder glass. IMC 1988 Proceedings, Tokyo, 25-27, May 1988.
7. Norton M.G. Thermodynamic considerations in the thick-film metallization of aluminium nitride substrates. J. Mater. Sci. Letters. 9:1990;91-93.
8. Kubaschewski, O., Evans, E. LL. and Alcock, C. B., Metallurgical Thermochemistry, 4th ed., Pergamon Press, Oxford, 1967.
9. Kasatschkow, E. A., Rastchöty po theorii metallurgitscheskich prozessow, Moskwa 1988.
10. Martin, F. W., Corning Glass Works, US Patent 3,113,878, 1963.