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Volumn 60, Issue 3, 1999, Pages 353-358
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Oxygen related donors in Czochralski-grown silicon annealed at 465-650 °C
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Author keywords
[No Author keywords available]
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Indexed keywords
ANNEALING;
CRYSTAL GROWTH FROM MELT;
ELECTRIC CONDUCTIVITY OF SOLIDS;
NITROGEN;
PRECIPITATION (CHEMICAL);
SEMICONDUCTING BORON;
SEMICONDUCTOR DOPING;
OXYGEN RELATED DONORS;
SEMICONDUCTING SILICON;
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EID: 0032668308
PISSN: 00223697
EISSN: None
Source Type: Journal
DOI: 10.1016/S0022-3697(98)00289-3 Document Type: Article |
Times cited : (7)
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References (20)
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