Moisture sensitive field effect transistors using SiO2/Si3N4/Al2O3 gate structure

Smart Materials and Structures

Volumn 8, Issue 2, 1999, Pages 274-277

  Chakraborty, Supratic ^a   Nemoto, Kohtaro ^b   Hara, Kazuhiro ^b   Lai, P T ^c  

^a UNIVERSITY OF KALYANI   (India)

^b TOKYO DENKI UNIVERSITY   (Japan)

^c UNIVERSITY OF HONG KONG   (Hong Kong)

Author keywords

[No Author keywords available]

Indexed keywords

ATMOSPHERIC HUMIDITY; ELECTRODES; GATES (TRANSISTOR); SEMICONDUCTOR DEVICE STRUCTURES; THERMAL EFFECTS; VLSI CIRCUITS;

MOISTURE SENSITIVE FIELD EFFECTS TRANSISTORS (HUMIFET);

MISFET DEVICES;

EID: 0032668302     PISSN: 09641726     EISSN: None     Source Type: Journal    
DOI: 10.1088/0964-1726/8/2/014     Document Type: Article

References (19)

1. Yamazoe N and Shimizu Y 1986 Sensors Actuators 10 379
2. Chakraborty S, Hasmi S A and Chandra S 1995 Rev. Sci. Instrum. 66 4367
3. Pelino M, Colella C, Cantalini C, Faccio M, Ferri G and D'Amico A 1992 Sensors Actuators B 7 464
4. Ansari S G, Ansari Z A, Kadam M R, Karekar R N and Aiyer R C 1994 Sensors Actuators B 21 159
5. Qu W and Meyer J 1997 Sensors Actuators B 40 175
6. Smetana W and Wiedermann W 1987 Sensors Actuators 11 329
7. Chen S N, Ramakrishnan E S , Huang R S and Grannemann W W 1984 IEEE Electron Device Lett. 5 452
8. Li G Q, Lai P T , Zeng S H , Huang M Q and Liu B Y 1995 Appl. Phys. Lett. 66 2436
9. Sberveglieri G, Anchisini R, Murri R, Ercoli C and Pinto N 1996 Sensors Actuators B 32 1
10. Silverthorne S V, Watson C W and Baxter R D 1989 Sensors Actuators 19 371
11. Hijikigawa M, Furubayashi H, Miyoshi S and Inami Y 1984 Proc. 4th Sensor Symp. (Tsukuba, 1984) p 135
12. Huyberechts G, Honoré M and Roggen J 1993 Sensors Actuators B 15/16 281
13. Ming-Tang W, Hong-Tao S and Ping L 1994 Sensors Actuators B 17 109
14. O'Sullivan J P and Wood G C 1970 Proc. R. Soc. A 317 511
15. Sato M, Yamamoto T, Meguro T and Yamanouchi K 1994 Sensors Actuators B 20 205
16. Sberveglieri G, Rinchetti G, Groppelli S and Fagila G 1994 Sensors Actuators B 18/19 551
17. Sadaoka Y, Sakai Y and Matsumoto S 1986 J. Mater. Sci. 21 1269
18. Sze S M 1981 Physics of Semiconductor Devices 2nd edn (New York: Wiley) ch 8
19. Spooner R C and Seraphim P 1954 Trans. Inst. Met. Finishing 31 29