SIMS with sample rotation: An experimental novelty or a practical necessity?

Surface and Interface Analysis

Volumn 28, Issue 1, 1999, Pages 49-55

  Sykes, D E ^a  

^a Loughborough Surface Analysis Ltd   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

SECONDARY ION MASS SPECTROMETRY; SUBSTRATES;

DEPTH PROFILING;

SEMICONDUCTOR MATERIALS;

EID: 0032668229     PISSN: 01422421     EISSN: None     Source Type: Journal    
DOI: 10.1002/(SICI)1096-9918(199908)28:1<49::AID-SIA616>3.0.CO;2-M     Document Type: Article

References (12)

1. A. Zalar, Thin Solid Films 124, 223 (1985).
2. E.-H. Cirlin and J. J. Vajo, in SIMS VIII, p. 347. Wiley, Chichester (1992).
3. M. Hatada, A. Karen, Y. Nakagawa, M. Saeda, M. Uchida, K. Okuno, F. Soeda and A. Ishitani, in SIMS VIII, p. 351. Wiley, Chichester (1992).
4. M. R. Houlton, O. D. Dosser, M. T. Emeny, A. Chew and D. E. Sykes, in SIMS VIII, p. 343. Wiley, Chichester (1992).
5. F. A. Stevie, P. M. Kahora, D. S. Simons and P. Chi, J. Vac. Sci Technol. A 6, 76 (1988).
6. A. Karen, K. Okumo, F. Soeda and A. Ishitani, in SIMS VII, p. 139. Wiley, Chichester (1990).
7. S. P. Smith, in SIMS VII, p. 107. Wiley, Chichester (1990).
8. M. R. Houlton, G. W. Blackmore, M. T. Emeny, C. R. Whitehouse, A. Chew and D. E. Sykes, Surf. Interface Anal. 20, 69 (1993).
9. F. A. Stevie and J. L. Moore, Surf. Interface Anal. 18, 147 (1992).
10. D. E. Sykes and A. Chew, Surf. Interface Anal. 21, 231 (1994).
11. D. E. Sykes, A. Chew, J. Hems and K. Stribley, Appl. Surf. Sci. 100/101, 77 (1996).
12. A. Chew, D. E. Sykes, S. J. Mullock and C. A. Coreltt, in SIMS IX, p. 302. Wiley, Chichester (1994).