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Volumn 3, Issue , 1999, Pages 1812-1817
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Closed-loop control of a base XY stage with rotational degree-of-freedom for a high-speed ultra-accurate manufacturing system
a
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Author keywords
[No Author keywords available]
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Indexed keywords
ADAPTIVE CONTROL SYSTEMS;
COMPUTER SIMULATION;
DEGREES OF FREEDOM (MECHANICS);
MATHEMATICAL MODELS;
NONLINEAR SYSTEMS;
POSITION MEASUREMENT;
ROBOTIC ASSEMBLY;
ROBUSTNESS (CONTROL SYSTEMS);
ROTATION;
SENSORS;
STEPPING MOTORS;
VELOCITY MEASUREMENT;
ADAPTIVE CURRENT LEVEL CONTROLLER;
AUTOMATED ASSEMBLY;
MANUFACTURING SYSTEM;
SAWYER SENSOR;
CLOSED LOOP CONTROL SYSTEMS;
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EID: 0032668204
PISSN: 10504729
EISSN: None
Source Type: Conference Proceeding
DOI: None Document Type: Article |
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Times cited : (14)
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References (13)
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