In situ growth monitoring during metalorganic chemical vapor deposition of YBa2Cu3Ox thin films by spectroscopic ellipsometry

Japanese Journal of Applied Physics, Part 2: Letters

Volumn 38, Issue 6 A/B, 1999, Pages

  Yamamoto, Shuu'ichirou ^a   Sugai, Satoshi ^a   Matsukawa, Yasunari ^b   Sengoku, Akio ^a   Tobisaka, Hiroshi ^a   Hattori, Takeo ^b   Oda, Shunri ^a  

^a TOKYO INSTITUTE OF TECHNOLOGY   (Japan)

^b TOKYO CITY UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

CRYSTAL ATOMIC STRUCTURE; ELLIPSOMETRY; FILM GROWTH; HIGH TEMPERATURE SUPERCONDUCTORS; METALLORGANIC CHEMICAL VAPOR DEPOSITION; OXIDE SUPERCONDUCTORS; SPECTROSCOPIC ANALYSIS; STRONTIUM COMPOUNDS; SUPERCONDUCTIVITY; YTTRIUM BARIUM COPPER OXIDES;

PSEUDODIELECTRIC FUNCTIONS; STRONTIUM TITANATE;

SUPERCONDUCTING FILMS;

EID: 0032666385     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/jjap.38.l632     Document Type: Article

References (19)

1. M. Leskelä, H. Mölsä and L. Niinistö: Supercond. Sci. Technol. 6 (1993) 627.
2. I. M. Watson: Chem. Vap. Deposition 3 (1997) 9.
3. S. Oda, H. Zama and S. Yamamoto: J. Cryst. Growth 145 (1994) 232.
4. S. Oda, S. Yamamoto and A. Kawaguchi: J. de Physique IV C5 (1995) 379.
5. S. Yamamoto, A. Kawaguchi, K. Nagata, T. Hattori and S. Oda: Appl. Surf. Sci. 112 (1997) 30.
6. K. Higashiyama, I. Hirabayashi and S. Tanaka: Jpn. J. Appl. Phys. 31 (1992) L835.
7. H. Zama, K. Sikai and S. Oda: Jpn. J. Appl. Phys. 31 (1992) L1243.
8. K. Sakai, H. Zama and S. Oda: Jpn. J. Appl. Phys. 32 (1993) L683.
9. S. Oda, H. Zama, K. Fujii, K. Sakai and Y. C. Chen: Thin Solid Films 225 (1993) 284.
10. S. Oda, K. Sakai and H. Zama: Appl. Surf. Sci. 75 (1994) 259.
11. M. Matsubara and I. Hirabayashi: Appl. Surf. Sci. 82-83 (1994) 494.
12. M. E. Bijlsma, D. H. A. Blank, H. Wormeester, A. Silfhout and H. Rogalla: J. Alloys Compounds 251 (1997) 15.
13. J. Kircher, M. Alouani, M. Garriga, P. Murugaraj, J. Maier, C. Thomsen, M. Cardona, O. K. Andersen and O. Jepsen: Phys. Rev. B 40 (1989) 7368.
14. J. Kircher, M. K. Kelly, S. Rashkeev, M. Alouani, D. Fuchs and M. Cardona: Phys. Rev. B 44 (1991) 217.
15. K. Maruyama, K. Shinagawa, T. Saito and T. Tsushima: Jpn. J. Appl. Phys. 34 (1995) L734.
16. J. Humlíček, M. Garria and M. Cardona: Solid State Commun. 67 (1988) 589.
17. R. Boyn, D. Wruck, M. Merbach and J.-P. Müller: Physica C 228 (1994) 49.
18. M. E. Bijlsma, H. Wormeester, D. H. A. Blank, E. Span, A. Silfhout and H. Rogalla: Phys. Rev. B 57 (1998) 13418.
19. M. K. Kelly, S.-W. Chen, K. Jenkin II, D. E. Aspnes, P. Barboux and J.-M. Tarascon: Appl. Phys. Lett. 53 (1988) 2333.