Uranium dioxide reaction in CF4/O2 RF plasma

Journal of Nuclear Materials

Volumn 270, Issue 1, 1999, Pages 253-258

  Kim, Yong Soo ^a   Min, Jin Young ^a   Bae, Ki Kwang ^b   Yang, Myung Seung ^b  

^a Hanyang University   (South Korea)

^b Korea Atomic Energy Research Institute   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

ACTIVATION ENERGY; ADDITION REACTIONS; CARBON INORGANIC COMPOUNDS; FLUORINE; MASS SPECTROMETRY; PLASMA ETCHING; PLASMAS; REACTION KINETICS;

CARBON TETRAFLUORIDE; FLUORINATION REACTION; URANIUM HEXAFLUORIDE; URANIUM PENTAFLUORIDE; URANIUM TETRAFLUORIDE;

URANIUM DIOXIDE;

EID: 0032665903     PISSN: 00223115     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0022-3115(98)00906-4     Document Type: Article

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