Helium and neon implantation and memory observed in a quadrupole mass spectrometer

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 155, Issue 1, 1999, Pages 53-59

  Rau, Ingo ^a   Putzka, Alfred ^a  

^a UNIVERSITY OF BREMEN   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

BINDING ENERGY; DESORPTION; HELIUM; MASS SPECTROMETERS; NEON; SPUTTERING; STAINLESS STEEL;

MEMORY EFFECT; QUADRUPOLE MASS SPECTROMETERS;

ION IMPLANTATION;

EID: 0032665493     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0168-583X(99)00227-X     Document Type: Article

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