Coherent multiple imaging by means of pupil plane filtering

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3679, Issue II, 1999, Pages 762-771

  Erdelyi, Miklos ^a   Kroyan, Armen ^a   Osvay, Koroly ^a   Bor, Zsolt ^a   Wilson, William L ^a   Smayling, Mike C ^a   Tittel, Frank K ^a  

^a RICE UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER SIMULATION; ETALONS; FABRY-PEROT INTERFEROMETERS; FOCUSING; IMAGE ENHANCEMENT; MASKS; MATHEMATICAL MODELS; OPTICAL FILTERS; OPTICAL RESOLVING POWER; PHASE SHIFT; SENSITIVITY ANALYSIS;

COHERENT MULTIPLE IMAGING (CMI); DEPTH OF FOCUS (DOF); PUPIL PLANE FILTERING;

PHOTOLITHOGRAPHY;

EID: 0032665210     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.354393     Document Type: Conference Paper

References (5)