MEMS optimization incorporating genetic algorithms

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3680, Issue I, 1999, Pages 84-93

  Kirkos, Gregory A ^a   Jurgilewicz, Robert P ^a   Duncan, Stephen J ^a  

^a CHARLES STARK DRAPER LABORATORY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

FINITE ELEMENT METHOD; FUNCTIONS; GENETIC ALGORITHMS; GYROSCOPES; INTERFACES (COMPUTER); MICROSENSORS; OPTIMIZATION;

MICROELECTROMECHANICAL SENSORS; TUNING FORK GYROSCOPES;

MICROELECTROMECHANICAL DEVICES;

EID: 0032665188     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Article

References (5)