Excimer-laser-induced densification of fused silica: Laser-fluence and material-grade effects on the scaling law

Journal of Non-Crystalline Solids

Volumn 244, Issue 2, 1999, Pages 159-171

  Liberman, V ^a   Rothschild, M ^a   Sedlacek, J H C ^a   Uttaro, R S ^a   Grenville, A ^b  

^a MIT LINCOLN LABORATORY   (United States)

^b INTEL CORPORATION   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

DENSIFICATION; EXCIMER LASERS; LASER PULSES; RATE CONSTANTS;

SCALING LAW;

FUSED SILICA;

EID: 0032665121     PISSN: 00223093     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0022-3093(99)00005-8     Document Type: Article

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