Comparison of optical and non-optical methods for measuring surface roughness

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3820, Issue , 1999, Pages 456-467

  Ohlidal, Ivan ^a   Ohlidal, Miloslav ^a   Franta, Daniel ^a   Tykal, Miroslav ^a  

^a MASARYK UNIVERSITY   (Czech Republic)

Author keywords

[No Author keywords available]

Indexed keywords

ROUGHNESS MEASUREMENT;

ROUGH NANOMETRIC SURFACES;

COHERENT LIGHT;

EID: 0032664507     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Article

References (10)