Normal current density effect in RF-discharge according to results of two-dimensional numerical modeling

IEEE Transactions on Plasma Science

Volumn 27, Issue 3, 1999, Pages 701-706

  Raizer, Yuri P ^a   Shneider, Mikhail N ^b  

^a INSTITUTE FOR PROBLEMS IN MECHANICS   (Russian Federation)

^b Princeton University   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CURRENT DENSITY; ELECTRIC POTENTIAL; MATHEMATICAL MODELS; PLASMAS;

RADIOFREQUENCY DISCHARGES;

ELECTRIC DISCHARGES;

EID: 0032664361     PISSN: 00933813     EISSN: None     Source Type: Journal    
DOI: 10.1109/27.774674     Document Type: Article

References (11)

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