Fabrication and characterization of infrared and sub-mm spiderweb bolometers with low-tc superconducting transition edge thermometers

IEEE Transactions on Applied Superconductivity

Volumn 9, Issue 2 PART 3, 1999, Pages 3862-3865

  Kiewiet, F B ^a   Bruijn, M P ^a   Hoevers, H F C ^a   Bento, A C ^a   Mels, W A ^a   De Korte P A J ^a  

^a SRON NETHERLANDS INSTITUTE FOR SPACE RESEARCH   (Netherlands)

Author keywords

[No Author keywords available]

Indexed keywords

BOLOMETERS; ETCHING; FABRICATION; THERMOMETERS; THIN FILMS;

ELECTROTHERMAL FEEDBACK; SUB-MM SPIDERWEB BOLOMETERS; THIN FILM DEPOSITION;

SUPERCONDUCTING DEVICES;

EID: 0032664072     PISSN: 10518223     EISSN: None     Source Type: Journal    
DOI: 10.1109/77.783870     Document Type: Article

References (7)

1. J.J. Bock, H.M. DelCastillo, A.D. Turner, J.W. Bccman, A.E. Lange, and P.D. Mauskopf, Infrared bolometers with silicon nitride micromesh absorbers, Prac. 30th Eslab Symp., pp. 119-121, 1996.
2. K.D. Irwin, An application of electrothermal feedback or high resolution cryogenic particle detection, Appi Phys. ln., vol. 66, pp. 1998-2000, 1995.
3. A.T. Lcc. S. Lee, J.M. Gildemeister, and P.L. Richards , Voltage-biased superconducting bolometers for infrared and mm-wave astronomy, Proc, LTD-7, ed. S. Cooper, 1997, Munich, Germany, pp. 123-125.
4. a [4] P.L. Richards, Bolometers for infrared and millimeter waves, J. Appl. Phys., vol. 76, pp. 1-24, 1994.
5. H. Kraus, Superconductive bolometers and calorimeters, Supercond. Sci. TechnoL. vol. 9, pp. 827 - 842, 1996.
6. J.C. Mather. Bolometer noise: nonequilibrium theory, Appl. Opt., vol 21, pp. 1125-1129, 1982.
7. W.A. Mels, M.P. Bruijn, H.F.C. Hoevers, M. Frericks, F.B. Kiewiet, A.C. Bento, and P.A.J. de Körte, Performance of hot-electron bolometers for infrared and X-ray detection, Proc. SPIE, 3445 (1998), to be published.