Correlation between morphology and island formation on InP surfaces

Conference Proceedings - International Conference on Indium Phosphide and Related Materials

Volumn , Issue , 1999, Pages 519-521

  Carlstrom, C F ^a   Anand, S ^a   Niemi, E ^a   Landgren, G ^a  

^a ROYAL INSTITUTE OF TECHNOLOGY   (Sweden)

Author keywords

[No Author keywords available]

Indexed keywords

ETCHING; MORPHOLOGY; OPTICAL CORRELATION; SURFACE ROUGHNESS;

ION BEAM ETCHING;

SEMICONDUCTING INDIUM PHOSPHIDE;

EID: 0032663559     PISSN: 10928669     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Article

References (6)