Compositional variations of sputter deposited Ti/W barrier layers on substrates with pronounced surface topography

Thin Solid Films

Volumn 348, Issue 1, 1999, Pages 227-232

  Jonsson, L B ^a   Hedlund, C ^a   Katardjiev, I V ^a   Berg, S ^a  

^a UPPSALA UNIVERSITY   (Sweden)

Author keywords

[No Author keywords available]

Indexed keywords

ENERGY DISPERSIVE SPECTROSCOPY; ION BOMBARDMENT; RUTHERFORD BACKSCATTERING SPECTROSCOPY; SPUTTER DEPOSITION; SURFACE TOPOGRAPHY; THIN FILMS; TITANIUM; TUNGSTEN;

ION ASSISTED DEPOSITION; TITANIUM FILMS; TUNGSTEN FILMS;

METALLIC FILMS;

EID: 0032663347     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(99)00130-3     Document Type: Article

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