Determination of thickness and composition of aluminium-oxide overlayers on aluminium substrates

Applied Surface Science

Volumn 144-145, Issue , 1999, Pages 11-15

  Jeurgens, L P H ^a   Sloof, W G ^a   Tichelaar, F D ^a   Borsboom, C G ^a   Mittemeijer, E J ^a,b  

^a DELFT UNIVERSITY OF TECHNOLOGY   (Netherlands)

^b MAX PLANCK INSTITUTE FOR INTELLIGENT SYSTEMS   (Germany)

Author keywords

Aluminium substrates; Aluminium oxide; Oxide film composition; Oxide film thickness; XPS spectra

Indexed keywords

ALUMINUM; COMPOSITION; ELECTRON ENERGY LEVELS; ELECTRON SCATTERING; OXIDES;

ALUMINUM OXIDE; FILM THICKNESS;

X RAY PHOTOELECTRON SPECTROSCOPY;

EID: 0032662610     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0169-4332(98)00755-7     Document Type: Article

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