SCOPUS 정보 검색 플랫폼

Thin Solid Films

Volumn 349, Issue 1-2, 1999, Pages 191-198

Effect of aluminium oxide caps on hillock formation in aluminium alloy films

(3) Iwamura, Eiji a Takagi, Katsutoshi a Ohnishi, Takashi a

a KOBE STEEL LTD (Japan)

Author keywords

Anodic oxidation; Metallization; Stress; Surface and interface states

Indexed keywords

ALUMINUM ALLOYS; ALUMINUM COMPOUNDS; ANODIC OXIDATION; FILM GROWTH; INTERFACES (MATERIALS); METALLIC FILMS; METALLIZING; SCANNING ELECTRON MICROSCOPY; SURFACE TOPOGRAPHY; TENSILE STRESS; THERMAL GRADIENTS; TRANSMISSION ELECTRON MICROSCOPY;

ALUMINUM OXIDE; HILLOCK FORMATION;

THIN FILMS;

EID: 0032661792 PISSN: 00406090 EISSN: None Source Type: Journal
DOI: 10.1016/S0040-6090(99)00220-5 Document Type: Article

Times cited : (27)

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