Influence of deposition parameters on RF sputtered DLC thin films

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3738, Issue , 1999, Pages 34-39

  Caneve, L ^a   Rizzo, A ^a   Sarto, F ^a   Scaglione, S ^a  

^a ENEA C R CASACCIA   (Italy)

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHOUS FILMS; CARBON; HARDNESS; OPTICAL FILMS; REFRACTIVE INDEX; SPECTROPHOTOMETERS; SPUTTER DEPOSITION; THIN FILMS;

DIAMOND-LIKE CARBON FILMS;

OPTICAL COATINGS;

EID: 0032661227     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Article

References (10)