Excimer laser induced removal of particles from hydrophilic silicon surfaces

Journal of Adhesion

Volumn 70, Issue 1, 1999, Pages 167-178

  Wu, X ^a   Sacher, E ^a   Meunier, M ^a  

^a ÉCOLE POLYTECHNIQUE DE MONTRÉAL   (Canada)

Author keywords

[No Author keywords available]

Indexed keywords

ADHESION; EXCIMER LASERS; HYDROGEN BONDS; LASER PULSES; LATEXES; PARTICLES (PARTICULATE MATTER); PHOTOACOUSTIC EFFECT; PIEZOELECTRIC TRANSDUCERS; POLYSTYRENES; PULSED LASER APPLICATIONS; SEMICONDUCTING SILICON; SILICA;

DRY LASER CLEANING; HYDROPHILIC SILICON SURFACES;

SURFACE CLEANING;

EID: 0032660954     PISSN: 00218464     EISSN: None     Source Type: Journal    
DOI: 10.1080/00218469908010493     Document Type: Article

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