Microstructure and radiation interactions of optical interference coatings for 193 nm applications

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3738, Issue , 1999, Pages 159-165

  Heber, J ^a   Thielsch, R ^a   Blaschke, H ^a   Kaiser, N ^a   Leinhos, U ^a   Goertler, A ^a  

^a FRAUNHOFER INSTITUTE FOR APPLIED OPTICS AND PRECISION ENGINEERING   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

CONTAMINATION; DURABILITY; HYDROCARBONS; INFRARED SPECTROSCOPY; LASER APPLICATIONS; LIGHT INTERFERENCE; MICROSTRUCTURE; OPTICAL MULTILAYERS; ULTRAVIOLET SPECTROSCOPY;

LASER INDUCED DAMAGE THRESHOLD (LIDT); NEAR INFRARED SPECTROSCOPY; OPTICAL INTERFERENCE COATINGS;

OPTICAL COATINGS;

EID: 0032660624     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Article

References (23)