Sputter deposition of cerium yttrium iron garnet films on substrates with ion-beam bombarded patterns

Japanese Journal of Applied Physics, Part 2: Letters

Volumn 38, Issue 6 A/B, 1999, Pages

  Okamura, Yasuyuki ^a   Yamamoto, Sadahiko ^b  

^a WAKAYAMA UNIVERSITY   (Japan)

^b OSAKA UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

EPITAXIAL GROWTH; ETCHING; ION BEAMS; ION BOMBARDMENT; MAGNETIC FILMS; MAGNETOOPTICAL EFFECTS; MAGNETRON SPUTTERING; MORPHOLOGY; OPTICAL FILMS; SPUTTER DEPOSITION; SUBSTRATES; SURFACE TREATMENT;

ION-BEAM ETCHING;

GARNETS;

EID: 0032659124     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/jjap.38.l636     Document Type: Article

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