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Volumn 10, Issue 5, 1999, Pages 354-361
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The energy-dispersive reflectomeler/diffractometer at BESSY-I
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Author keywords
Interface roughness; Lattice parameter; Layer thickness; Process control of thin film covering; Time resolved structural analysis of thin films and multilayers; X ray diffraction; X ray reflectometry
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Indexed keywords
DIFFRACTOMETERS;
FATTY ACIDS;
INTERFACES (MATERIALS);
LATTICE CONSTANTS;
PROCESS CONTROL;
SPECTRUM ANALYSIS;
STORAGE RINGS;
THIN FILMS;
X RAY DIFFRACTION ANALYSIS;
X RAY REFLECTOMETRY/DIFFRACTOMETRY;
REFLECTOMETERS;
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EID: 0032658837
PISSN: 09570233
EISSN: None
Source Type: Journal
DOI: 10.1088/0957-0233/10/5/003 Document Type: Article |
Times cited : (22)
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References (20)
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