Variations to the influence of lens aberration invoked with PSM and OAI

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3679, Issue I, 1999, Pages 330-346

  Smith, Bruce W ^a  

^a ROCHESTER INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ABERRATIONS; IMAGE ENHANCEMENT; IMAGING SYSTEMS; MASKS; OPTICAL INSTRUMENT LENSES; OPTIMIZATION; PHASE SHIFT;

OFF-AXIS ILLUMINATION (OAI);

PHOTORESISTS;

EID: 0032656723     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.354346     Document Type: Conference Paper

References (6)