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Volumn , Issue , 1999, Pages 88-93
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Direct integration (DI) of solid state stress sensors with single crystal micro-electro-mechanical systems for integrated displacement sensing
a
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Author keywords
[No Author keywords available]
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Indexed keywords
CURRENT VOLTAGE CHARACTERISTICS;
ENERGY GAP;
FINITE ELEMENT METHOD;
METALLIZING;
REACTIVE ION ETCHING;
SEMICONDUCTING SILICON;
SINGLE CRYSTALS;
TRANSFER FUNCTIONS;
INTEGRATED DISPLACEMENT SENSING;
MICROELECTROMECHANICAL DEVICES;
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EID: 0032655719
PISSN: None
EISSN: None
Source Type: Conference Proceeding
DOI: 10.1109/memsys.1999.746758 Document Type: Conference Paper |
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Times cited : (6)
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References (13)
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