Conjugate heat-transfer analysis of 300-mm bake station

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3678, Issue II, 1999, Pages 1296-1306

  Ramanan, Natarajan ^a   Liang, Frank F ^a   Sims, James B ^a  

^a FSI Int   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

BOUNDARY CONDITIONS; COMPUTATIONAL FLUID DYNAMICS; COMPUTER SIMULATION; HEAT TRANSFER;

BIOT NUMBER;

PHOTOLITHOGRAPHY;

EID: 0032654759     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.350182     Document Type: Conference Paper

References (8)