Fused silica for 157 nm transmittance

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3676, Issue II, 1999, Pages 834-839

  Smith, Charlene M ^a   Moore, Lisa A ^a  

^a Corning Inc ^*  (United States)

Author keywords

[No Author keywords available]

Indexed keywords

FUSED SILICA; LIGHT TRANSMISSION; MASKS;

PHOTOMASK MATERIALS;

PHOTOLITHOGRAPHY;

EID: 0032654751     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.351163     Document Type: Conference Paper

References (12)