MEMS micro-shutter SLM for intensity modulation

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3633, Issue , 1999, Pages 254-259

  Karpinsky, John R ^a   Clark, Rodney ^a   Hammer, Jay ^a   Brown, Daniel ^a  

^a MEMS Optical Incorporated   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CAMERA SHUTTERS; CMOS INTEGRATED CIRCUITS; ELECTROSTATICS; EXPOSURE CONTROLS; LIGHT MODULATION; MICROELECTROMECHANICAL DEVICES; MICROOPTICS; PLASMA ETCHING; PRINTING; REACTIVE ION ETCHING;

COMB INTERDIGITIZED DRIVE; FOUCAULT MICRO SHUTTER ARRAY; INTENSITY MODULATION; SPATIAL LIGHT MODULATOR;

LIGHT MODULATORS;

EID: 0032654394     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Article

References (0)