Electrical and piezoresistive characterization of laser-recrystallized polysilicon layers in SOI structures

Electron Technology (Warsaw)

Volumn 32, Issue 1, 1999, Pages 146-150

  Druzhinin, A ^a   Lavitska, E ^a   Maryamova, I ^a   Pankevich, I ^a   Pankov, Y ^a  

^a LVIV POLYTECHNIC NATIONAL UNIVERSITY   (Ukraine)

Author keywords

[No Author keywords available]

Indexed keywords

CRYSTALLIZATION; EPITAXIAL GROWTH; GRAIN SIZE AND SHAPE; IRRADIATION; LASER APPLICATIONS; MICROSTRUCTURE; PIEZOELECTRICITY; SENSORS; SILICON ON INSULATOR TECHNOLOGY; SILICON WAFERS;

MICROZONE LASER RECRYSTALLIZATION; PIEZORESISTIVE MECHANICAL SENSORS;

SEMICONDUCTING SILICON;

EID: 0032654123     PISSN: 00709816     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (11)