Effect of oxygen plasma treatment on hydrogen-damaged Pt/Pb(ZrxTi1-x)O3/Pt ferroelectric thin-film capacitor

Japanese Journal of Applied Physics, Part 2: Letters

Volumn 38, Issue 5 B, 1999, Pages

  Park, Youngsoo ^a   Lee, June Key ^a   Chung, Ilsub ^a   Lee, Jai Young ^a  

^a Samsung Advanced Institute of Technology (SAIT)   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

CATALYST ACTIVITY; COMPOSITION EFFECTS; ELECTROCHEMICAL ELECTRODES; ELECTRON CYCLOTRON RESONANCE; FERROELECTRIC DEVICES; HYDROGEN; LEAD COMPOUNDS; OXYGEN; PLASMA APPLICATIONS; PLATINUM; SURFACE TREATMENT; THIN FILM DEVICES;

LEAD ZIRCONATE TITANATE;

CAPACITORS;

EID: 0032653902     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/jjap.38.l577     Document Type: Article

References (7)